This inventor holds 2 USPTO granted patents and 1 published patent application. Top assignee: L'air Liquide, Societe Anonyme a Directoire Et Conseil De Surveillance Pour L'etude Et L'exploitation Des Procedes Georges Claude. Active years: 2003-2009.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- Ibaraki Prefecture, JP (2003)
- Ibaraki, JP (2009)
Company Filing History:
Years Active: 2003-2009
Title: Akinobu Nasu: Innovator in Source Liquid Supply Technology
Introduction
Akinobu Nasu is a prominent inventor based in Ibaraki, Japan. He has made significant contributions to the field of source liquid supply technology, holding 2 patents that showcase his innovative approach to solving complex problems in the industry.
Latest Patents
Nasu's latest patents include a source liquid supply apparatus having a cleaning function. This invention focuses on avoiding the residues of source liquid and cleaning fluid in the connection region between the source liquid feed conduit and the source tank. The apparatus features a flow-switching mechanism that enhances efficiency by managing the flow of liquids effectively.
Another notable patent is for a copper source liquid useful in Metal-Organic Chemical Vapor Deposition (MOCVD) processes. This invention provides a copper source liquid that comprises water and a source component, primarily Cu(hfac)TMVS. The innovation allows for improved reproducibility of CVD film quality by controlling the amount of water added to the copper source liquid.
Career Highlights
Akinobu Nasu is currently employed at L'Air Liquide, Société Anonyme à Directoire et Conseil de Surveillance pour l'Étude et l'Exploitation des Procédés Georges Claude. His work at this esteemed company has allowed him to develop and refine his inventions, contributing to advancements in the field.
Collaborations
Nasu has collaborated with notable colleagues such as Jean-Marc Girard and Olivier Letessier. These partnerships have fostered a creative environment that encourages innovation and the sharing of ideas.
Conclusion
Akinobu Nasu's contributions to source liquid supply technology and MOCVD processes highlight his role as a key innovator in his field. His patents reflect a commitment to improving industrial processes and enhancing the quality of semiconductor manufacturing.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile