Company Filing History:

7 out of 8,889

Nikon Corporation

Years Active: 1999-2004

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8 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 6835683 - Quartz glass member and projection aligner (2004-12-28),

2. 6656860 - Synthetic silica glass member, photolithography apparatus and process for producing photolithography apparatus (2003-12-02),

3. 6649268 - Optical member made of silica glass, method for manufacturing silica glass, and reduction projection exposure apparatus using the optical member (2003-11-18),

4. 6442973 - Synthetic silica glass and its manufacturing method (2002-09-03),

5. 6339033 - Silica glass having superior durability against excimer laser beams and method for manufacturing the same (2002-01-15),

6. 6320661 - Method for measuring transmittance of optical members for ultraviolent use, synthetic silica glass, and photolithography apparatus using the same (2001-11-20),

7. 6174830 - Silica glass having superior durability against excimer laser beams and method for manufacturing the same (2001-01-16),

8. 5987524 - Local area network system and router unit (1999-11-16),

Title: Akiko Yoshida: Innovator in Photolithography Technology

Introduction

Akiko Yoshida is a prominent inventor based in Kawasaki, Japan. She has made significant contributions to the field of photolithography, particularly in the development of advanced silica glass members used in optical systems. With a total of 8 patents to her name, her work has been instrumental in enhancing the precision and efficiency of projection exposure apparatus.

Latest Patents

Yoshida's latest patents include innovations such as a quartz glass member and a projection aligner. The silica glass member she developed is characterized by specific compositions that optimize its performance when exposed to ArF excimer laser light. This innovation allows for uniform exposure while minimizing variations in illuminance on reticle surfaces and exposure areas on wafers. Additionally, her work on synthetic silica glass members has improved the functionality of photolithography apparatus, ensuring high-quality pattern projection onto photosensitive plates.

Career Highlights

Throughout her career, Akiko Yoshida has worked with leading companies in the technology sector, including Nikon Corporation and Fujitsu Corporation. Her expertise in photolithography and optical systems has positioned her as a key figure in the advancement of semiconductor manufacturing technologies.

Collaborations

Yoshida has collaborated with notable professionals in her field, including Norio Komine and Hiroki Jinbo. These partnerships have furthered her research and development efforts, leading to groundbreaking innovations in photolithography.

Conclusion

Akiko Yoshida's contributions to the field of photolithography and her innovative patents have significantly impacted the technology landscape. Her work continues to influence advancements in optical systems and semiconductor manufacturing.

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