This inventor holds 3 USPTO granted patents and 1 EPO patent. Top assignee: Ushio Denki Kabushiki Kaisha. Active years: 2003-2004.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- Gotenba, JP (2003)
- Oyama, JP (2003 - 2004)
Company Filing History:
Years Active: 2003-2004
Title: Akifumi Tada: Innovator in Excimer Laser Technology
Introduction
Akifumi Tada is a prominent inventor based in Oyama, Japan. He has made significant contributions to the field of excimer laser technology, holding a total of 3 patents. His work focuses on developing advanced laser devices that are crucial for various applications, including semiconductor lithography.
Latest Patents
Tada's latest patents include innovative designs for ArF excimer laser devices, KrF excimer laser devices, and fluorine laser devices. The ArF excimer laser device is designed to achieve a pulse width FWHM of 20 ns or more, a pulse duration time of 50 ns or more, and a spectrum line width FWHM of 0.35 pm or less. This device connects to the output terminal of a magnetic pulse compression circuit and features a pair of laser discharge electrodes within the laser chamber. The output waveform of the laser pulse exhibits a bifurcated form, ensuring optimal performance.
The narrow-band excimer laser apparatus utilizes a bandwidth-narrowing optical system, which includes a beam diameter-enlarging optical system and a Littrow mounting reflection type diffraction grating. This design overcomes limitations related to bandwidth narrowing caused by wavefront distortion, making it suitable for use as a laser light source in semiconductor lithography.
Career Highlights
Akifumi Tada is associated with Ushio Denki Kabushiki Kaisha, where he continues to innovate in the field of laser technology. His work has been instrumental in advancing the capabilities of excimer lasers, which are essential in various high-precision applications.
Collaborations
Tada has collaborated with notable colleagues, including Koji Kakizaki and Tatushi Igarashi. Their combined expertise has contributed to the development of cutting-edge laser technologies.
Conclusion
Akifumi Tada's contributions to excimer laser technology have positioned him as a key figure in the field. His innovative patents and collaborations reflect his commitment to advancing laser applications, making a significant impact on the industry.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile