Company Filing History:
Years Active: 2004
Title: Innovations of Aaron D Shore in Integrated Circuit Repair
Introduction
Aaron D Shore is a notable inventor based in Poughkeepsie, NY (US). He has made significant contributions to the field of integrated circuit repair, holding a total of 2 patents. His work focuses on advanced techniques that enhance the reliability and efficiency of semiconductor devices.
Latest Patents
One of Aaron's latest patents is titled "Apparatus and techniques for scanning electron beam based chip repair." This invention describes a method and apparatus for editing an integrated circuit by bombarding a feature in need of editing with either a low-energy or high-energy electron beam in the presence of a gas. The low-energy electrons activate reactants adsorbed on the surface of the feature, forming active species that facilitate the editing process. This innovative approach minimizes IC damage, leakage between metal features, wafer contamination, and physical sputtering of undesired material while maintaining nanometer-scale spatial resolution.
Another significant patent is the "Focused ion beam process for removal of copper." This process involves milling copper metal from a substrate with an exposed copper surface. It includes absorbing a halogen gas onto the exposed surface to generate reaction products, removing unreacted halogen gas, and directing a focused ion beam onto the surface to selectively remove portions of the reaction products. This method enhances the precision of copper removal in semiconductor manufacturing.
Career Highlights
Aaron D Shore is currently employed at International Business Machines Corporation (IBM), where he continues to innovate in the field of semiconductor technology. His work has been instrumental in advancing techniques that improve the performance and reliability of integrated circuits.
Collaborations
Throughout his career, Aaron has collaborated with notable colleagues, including Herschel M Marchman and Michael Ray Sievers. These collaborations have contributed to the development of cutting-edge technologies in the semiconductor industry.
Conclusion
Aaron D Shore's contributions to integrated circuit repair through his innovative patents demonstrate his expertise and commitment to advancing technology. His work at IBM and collaborations with esteemed colleagues further highlight his impact on the field.