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Tucson, AZ, United States of America

Zetetic Institute

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USPTO Granted Patents = 40

% Expired Patents = 82.5

Forward Citations = 989

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4 inventors (with patents filed for the assignee):

Henry Allen Hill (39 out of 145 patents)

Gary L Womack (1 out of 1 patent)

Douglas A Ziebell (1 out of 1 patent)

4. Paul H Oglesby (1 out of 1 patent)

Core Competencies:

Optical System

Phase Shifting

Wavefront Measurement

Lithography Metrology

Adaptive Surfaces

Interferometric Microscopy

Catadioptric Systems

Spatial Impulse Response

Critical Dimensions

Atmospheric Turbulence

Vibrations Compensation

Overlay Metrology

40 patents: Sort by Forward Citations

1. 7646490 - Apparatus and method for in situ and ex situ measurement of spatial impulse response of an optical system using phase shifting point-diffraction interferometry (2010-01-12),

2. 7508527 - Apparatus and method of in situ and ex situ measurement of spatial impulse response of an optical system using phase-shifting point-diffraction interferometry (2009-03-24),

3. 7495769 - Apparatus and method for joint measurements of conjugated quadratures of fields of reflected/scattered and transmitted beams by an object in interferometry (2009-02-24),

4. 7460245 - Apparatus and method for measurement and compensation of atmospheric turbulence effects in wavefront interferometry (2008-12-02),

5. 7428058 - Apparatus and method for in situ and ex situ measurements of optical system flare (2008-09-23),

6. 7405832 - Apparatus and methods for reduction and compensation of effects of vibrations and of environmental effects in wavefront interferometry (2008-07-29),

7. 7355722 - Catoptric and catadioptric imaging systems with adaptive catoptric surfaces (2008-04-08),

8. 7345771 - Apparatus and method for measurement of critical dimensions of features and detection of defects in UV, VUV, and EUV lithography masks (2008-03-18),

9. 7324216 - Sub-nanometer overlay, critical dimension, and lithography tool projection optic metrology systems based on measurement of exposure induced changes in photoresist on wafers (2008-01-29),

10. 7324209 - Apparatus and method for ellipsometric measurements with high spatial resolution (2008-01-29),

11. 7312877 - Method and apparatus for enhanced resolution of high spatial frequency components of images using standing wave beams in non-interferometric and interferometric microscopy (2007-12-25),

12. 7298496 - Apparatus and methods for overlay, alignment mark, and critical dimension metrologies based on optical interferometry (2007-11-20),

13. 7263259 - Multiple-source arrays fed by guided-wave structures and resonant guided-wave structure cavities (2007-08-28),

14. 7180604 - Catoptric and catadioptric imaging systems with pellicle and aperture-array beam-splitters and non-adaptive and adaptive catoptric surfaces (2007-02-20),

15. 7164480 - Compensation for effects of mismatch in indices of refraction at a substrate-medium interface in non-confocal, confocal, and interferometric confocal microscopy (2007-01-16),

Company Overview

The Zetetic Institute, based in Tucson, AZ, specializes in advanced optical technologies, focusing on areas such as optical interferometry and catoptric imaging systems. Their expertise extends to confocal microscopy and lithography metrology, providing innovative solutions for high-precision measurements and imaging applications. The organization is also engaged in research related to wavefront measurement and atmospheric turbulence compensation, aiming to enhance spatial resolution in various scientific and industrial fields.

Profile summary synthesized from public USPTO records and patent filings.

Company Badge

USPTO Data Jan 1 1976 - Oct 27 2026

40 Patents

#17 in Tucson, AZ

#97 in Arizona

#8,637 in US

#17,098 in the World

Tucson, AZ, United States of America

Zetetic Institute

Forward Citations = 989

4 inventors:

Henry Allen Hill (39 out of 145 patents)

Gary L Womack (1 out of 1 patent)

Douglas A Ziebell (1 out of 1 patent)

4. Paul H Oglesby (1 out of 1 patent)

IDiyas Innovation Intelligence. (2026). Company Patent Portfolio: Zetetic Institute. Retrieved from https://idiyas.com/company/zetetic-institute

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]

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