1 Patents
#5,740 in Tokyo
#15,554 in Japan
Tokyo Electron Limeted
Forward Citations = 41
3 inventors:
3 inventors (with patents filed for the assignee):
Hiroyuki Nakayama (1 out of 68 patents)
Kouji Mitsuhashi (1 out of 29 patents)
Shinya Nishimoto (1 out of 17 patents)
1 patent: