The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 04, 2005
Filed:
Sep. 30, 2002
Applicants:
Shinya Nishimoto, Nirasaki, JP;
Kouji Mitsuhashi, Nirasaki, JP;
Hiroyuki Nakayama, Nirasaki, JP;
Inventors:
Assignee:
Tokyo Electron Limeted, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
C23C 1600 ; C23C 16455 ; H01L 21306 ; C23F 100 ;
U.S. Cl.
CPC ...
Abstract
The present invention presents an improved baffle plate for a plasma processing system, wherein the design and fabrication of the baffle plate advantageously provides for a uniform processing plasma in the process space with substantially minimal erosion of the baffle plate.