3 Patents
#3,263 in Tokyo
#8,771 in Japan
Tokyo Elctron Limited
Forward Citations = 12
3 inventors:
3 inventors (with patents filed for the assignee):
Takahisa Otsuka (1 out of 18 patents)
Wataru Machiyama (1 out of 5 patents)
Katsutoshi Ishii (1 out of 32 patents)
3 patents: