Forward Citations = 236

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6 inventors (with patents filed for the assignee):

W Thomas Novak (3 out of 7 patents)

Lawrence M Rosenberg (1 out of 13 patents)

Martin Braun (1 out of 10 patents)

4. Peter R Jagusch (1 out of 1 patent)

5. Anwar Husain (1 out of 1 patent)

6. Frank G Kadi (1 out of 1 patent)

7 patents: Sort by Forward Citations

1. 4549843 - Mask loading apparatus, method and cassette (1985-10-29),

2. 4544311 - Mask alignment apparatus (1985-10-01),

3. 4540240 - Optical objective adjusting apparatus (1985-09-10),

4. 4525852 - Alignment apparatus (1985-06-25),

5. 4521903 - High power x-ray source with improved anode cooling (1985-06-04),

6. 4516253 - Lithography system (1985-05-07),

7. 4514858 - Lithography system (1985-04-30),

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This text is generated by artificial intelligence and may not be accurate.