The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 01, 1985
Filed:
Mar. 15, 1983
Anwar Husain, Mt. View, CA (US);
Micronix Partners, Los Gatos, CA (US);
Abstract
A mask aligner (10) includes a ring member (11) having an aperture (13) and a series of internal pneumatic cylinders (14-17) having rolling bearing surfaces (19) at the ends of piston rod shafts (18) wherein when a mask (20) is positioned in the aperture, one bearing surface is actuated inwardly to move the mask laterally into engagement with others of said bearing surfaces to rigidly hold and coarse align the mask. Fine accurate alignment in the x, y and .phi. directions are provided by a spaced series of linear motors (40, 41, 42) and a linkage (45) extending between the motor shaft (43) and a rigid post on a fixed support arm (12), the linkage being of sufficient flexibility to bend when the linear motor moves its shaft (43) inwardly to shorten the span between the motor(s) and the rigid post, and of sufficient stiffness to act as a push rod when the linear motor moves its shaft outwardly to lengthen the span between the motor(s) and the rigid post.