The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 22, 2018
Filed:
Mar. 29, 2016
Applicant:
Air Products and Chemicals, Inc., Allentown, PA (US);
Inventors:
Seiji Inaoka, Macungie, PA (US);
William Jack Casteel, Jr., Fountain Hill, PA (US);
Raymond Nicholas Vrtis, Orefield, PA (US);
Kathleen Esther Theodorou, Bethlehem, PA (US);
Tianniu Chen, Westford, MA (US);
Mark Richard Brown, Schnecksville, PA (US);
Assignee:
VERSUM MATERIALS US, LLC, Tempe, AZ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D 1/18 (2006.01); C09D 4/00 (2006.01); B08B 3/10 (2006.01); B81C 1/00 (2006.01); H01L 21/02 (2006.01); C11D 11/00 (2006.01); C11D 3/16 (2006.01); C11D 3/36 (2006.01); H01L 21/3105 (2006.01);
U.S. Cl.
CPC ...
C09D 4/00 (2013.01); B08B 3/10 (2013.01); B81C 1/00849 (2013.01); C11D 3/162 (2013.01); C11D 3/36 (2013.01); C11D 11/0047 (2013.01); H01L 21/0206 (2013.01); H01L 21/02041 (2013.01); H01L 21/02068 (2013.01); H01L 21/02129 (2013.01); H01L 21/02282 (2013.01); H01L 21/3105 (2013.01);
Abstract
Treatment compositions and methods of treating the surface of a substrate by using the treatment composition, and a semiconductor or MEMS substrate having the treatment composition thereon.