The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2018
Filed:
Dec. 31, 2014
Applied Materials, Inc., Santa Clara, CA (US);
Junqi Wei, Xi'an, CN;
Zhitao Cao, Campbell, CA (US);
Yueh Sheng Ow, Singapore, SG;
Ananthkrishna Jupudi, Milipitas, CA (US);
Kirankumar Savandaiah, Bangalore, IN;
Xin Wang, Singapore, SG;
Sriskantharajah Thirunavukarasu, Singapore, SG;
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
Embodiments of the present disclosure include methods and apparatus for controlling titanium-tungsten (TiW) target nodule formation. In some embodiments, a target includes: a source material comprising predominantly titanium (Ti) and tungsten (W), formed from a mixture of titanium powder and tungsten powder, wherein a grain size of a predominant quantity of the titanium powder is less than or equal to a grain size of a predominant quantity of the tungsten powder.