The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 27, 2018

Filed:

Dec. 15, 2016
Applicant:

Taiwan Semiconductor Manufacturing Company Ltd., Hsinchu, TW;

Inventors:

Tien-Chung Yang, Hsinchu, TW;

Lin-Chih Huang, Hsinchu, TW;

Hsien-Wei Chen, Hsinchu, TW;

An-Jhih Su, Taoyuan County, TW;

Li-Hsien Huang, Hsinchu County, TW;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/48 (2006.01); H01L 23/31 (2006.01); H01L 23/482 (2006.01); H01L 23/485 (2006.01); H01L 23/00 (2006.01); H01L 21/56 (2006.01); H01L 21/60 (2006.01);
U.S. Cl.
CPC ...
H01L 23/3114 (2013.01); H01L 21/565 (2013.01); H01L 23/485 (2013.01); H01L 23/4824 (2013.01); H01L 24/03 (2013.01); H01L 24/11 (2013.01); H01L 24/13 (2013.01); H01L 24/94 (2013.01); H01L 2021/60022 (2013.01); H01L 2224/0391 (2013.01); H01L 2224/10126 (2013.01); H01L 2224/11013 (2013.01); H01L 2224/11466 (2013.01); H01L 2224/11602 (2013.01); H01L 2224/13005 (2013.01); H01L 2224/13026 (2013.01);
Abstract

A method of manufacturing a semiconductor device includes providing a semiconductor substrate including a conductive pad disposed thereon; disposing a polymeric material over the semiconductor substrate and the conductive pad; patterning the polymeric material to form an opening exposing at least a portion of the conductive pad; disposing a conductive layer over the polymeric material and the portion of the conductive pad; and forming a conductor over the portion of the conductive pad and within the opening.


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