The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 20, 2018

Filed:

Mar. 07, 2016
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;

Inventors:

Matthew T. Currie, Brookline, MA (US);

Anthony J. Lochtefeld, Ipswich, MA (US);

Richard Hammond, Harriseahead, GB;

Eugene A. Fitzgerald, Windham, NH (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 29/10 (2006.01); H01L 29/36 (2006.01); H01L 29/161 (2006.01); H01L 29/66 (2006.01); H01L 29/78 (2006.01);
U.S. Cl.
CPC ...
H01L 29/1054 (2013.01); H01L 29/105 (2013.01); H01L 29/161 (2013.01); H01L 29/36 (2013.01); H01L 29/66477 (2013.01); H01L 29/66651 (2013.01); H01L 29/7842 (2013.01); H01L 29/66545 (2013.01); H01L 29/78 (2013.01); Y10S 438/926 (2013.01);
Abstract

Semiconductor structures and devices including strained material layers having impurity-free zones, and methods for fabricating same. Certain regions of the strained material layers are kept free of impurities that can interdiffuse from adjacent portions of the semiconductor. When impurities are present in certain regions of the strained material layers, there is degradation in device performance. By employing semiconductor structures and devices (e.g., field effect transistors or 'FETs') that have the features described, or are fabricated in accordance with the steps described, device operation is enhanced.


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