The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 20, 2018
Filed:
Mar. 16, 2016
Nuflare Technology, Inc., Yokohama-shi, JP;
NuFlare Technology, Inc., Yokohama-shi, JP;
Abstract
An inspection method includes: irradiating a first portion of a sample to be inspected with a lighting light; obtaining a first optical image in which the lighting light transmitted through the first portion is imaged or a second optical image in which the lighting light reflected by the first optical image is imaged; based on a first defect determination threshold, performing a first comparison between a first reference image referred to the first optical image and the first optical image or a second comparison between a second reference image referred to the second optical image and the second optical image; determining whether the first portion includes a first defect; storing a first coordinate of the first defect, the first defect determination threshold, the first optical image or the second optical image, and the first reference image or the second reference image in a case where the first portion is determined to have the first defect; calculating the number of first defects in the first portion as a defect total number; calculating a second defect determination threshold increased by a predetermined amount from the first defect determination threshold in a case where the defect total number is larger than the defect number threshold; and equalizing the second defect determination threshold with the first defect determination threshold in a case where the defect total number is equal to or less than the defect number threshold.