The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 20, 2018

Filed:

Jul. 05, 2016
Applicant:

Oxford Instruments Asylum Research, Inc., Goleta, CA (US);

Inventors:

Roger Proksch, Santa Barbara, CA (US);

Roger C. Callahan, Goleta, CA (US);

Frank Stetter, Garching, DE;

Ted Limpoco, Goleta, CA (US);

Sophia Hohlbauch, Goleta, CA (US);

Jason Bemis, Goleta, CA (US);

Jason Cleveland, Ventura, CA (US);

Nicholas Geiss, Oxnard, CA (US);

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01Q 60/24 (2010.01); G01Q 70/08 (2010.01); G01Q 40/00 (2010.01); G01Q 60/32 (2010.01); G01Q 10/06 (2010.01);
U.S. Cl.
CPC ...
G01Q 60/24 (2013.01); G01Q 40/00 (2013.01); G01Q 60/32 (2013.01); G01Q 70/08 (2013.01); G01Q 10/065 (2013.01);
Abstract

Improvements for rapidly calibrating and automatically operating a scanning probe microscope are disclosed. A central component of the SPM is the force transducer, typically a consumable cantilever element. By automatically calibrating transducer characteristics along with other instrumental parameters, scanning parameters can be rapidly and easily optimized, resulting in high-throughput, repeatable and accurate measurements. In contrast to dynamic optimization schemes, this can be accomplished before the surface is contacted, avoiding tip or sample damage from the beginning of the measurement process.


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