The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 13, 2018
Filed:
Dec. 29, 2016
Kla-tencor Corporation, Milpitas, CA (US);
Kris Bhaskar, San Jose, CA (US);
Grace Hsiu-Ling Chen, Los Gatos, CA (US);
Keith Wells, Santa Cruz, CA (US);
Wayne McMillan, San Jose, CA (US);
Jing Zhang, Santa Clara, CA (US);
Scott Young, Soquel, CA (US);
Brian Duffy, San Jose, CA (US);
KLA-Tencor Corp., Milpitas, CA (US);
Abstract
Hybrid inspectors are provided. One system includes computer subsystem(s) configured for receiving optical based output and electron beam based output generated for a specimen. The computer subsystem(s) include one or more virtual systems configured for performing one or more functions using at least some of the optical based output and the electron beam based output generated for the specimen. The system also includes one or more components executed by the computer subsystem(s), which include one or more models configured for performing one or more simulations for the specimen. The computer subsystem(s) are configured for detecting defects on the specimen based on at least two of the optical based output, the electron beam based output, results of the one or more functions, and results of the one or more simulations.