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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9911676 B1

PDFFull Text
Date of Patent:
Mar. 06, 2018

Filed:

Jan. 03, 2017

System and method for gas-phase passivation of a semiconductor surface

Applicant:

Asm Ip Holding B.v., Almere, NL;

Inventors:

Fu Tang, Gilbert, AZ (US);

Michael E. Givens, Scottsdale, AZ (US);

Qi Xie, Lueven, BE;

Xiaoqiang Jiang, Tempe, AZ (US);

Petri Raisanen, Gilbert, AZ (US);

Pauline Calka, Leuven, BE;

Assignee:

ASM IP Holding B.V., Almere, NL;

Attorney:

Snell & Wilmer L.L.P.

Primary Examiner:

Bo Fan

Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 23/31 (2006.01); H01L 23/29 (2006.01); C23C 16/455 (2006.01); C23C 16/40 (2006.01);
U.S. Cl.
CPC ...
H01L 23/3171 (2013.01); C23C 16/40 (2013.01); C23C 16/45544 (2013.01); H01L 21/0228 (2013.01); H01L 21/02178 (2013.01); H01L 21/02205 (2013.01); H01L 21/02274 (2013.01); H01L 21/02301 (2013.01); H01L 23/291 (2013.01);
Abstract

Improved methods and systems for passivating a surface of a high-mobility semiconductor and structures and devices formed using the methods are disclosed. The method includes providing a high-mobility semiconductor surface to a chamber of a reactor and exposing the high-mobility semiconductor surface to a gas-phase chalcogen precursor to passivate the high-mobility semiconductor surface.

Published as:
US2017117202A1; US9911676B2;

Find Patent Forward Citations

Tang, Fu. (2018). System and method for gas-phase passivation of a semiconductor surface (U.S. Patent No. 9911676). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9911676

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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