The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 06, 2018
Filed:
Apr. 03, 2014
Applicant:
Kla-tencor Corporation, Milpitas, CA (US);
Inventors:
Barak Bringoltz, Rishon le Tzion, IL;
Irina Vakshtein, Haifa, IL;
Ofir Aharon, Yokneam Eililt, IL;
Guy Ben Dov, Haifa, IL;
Zeev Bomzon, Kiryat Tivon, IL;
Assignee:
KLA-Tencor Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01C 19/00 (2013.01); G01N 21/47 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G01N 21/4785 (2013.01); G03F 7/70633 (2013.01);
Abstract
Methods and calibrations modules are provided, for calibrating a pupil center in scatterometry overlay measurements. The calibration comprises calculating fluctuations from a first statistical figure of merit such as an average of an overlay signal per pixel at the pupil and significantly reducing, for example minimizing, the fluctuations with respect to a second statistical figure of merit thereof, such as a pupil weighted variance of the fluctuations.