The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 06, 2018
Filed:
Apr. 22, 2014
Applicant:
Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, TW;
Inventors:
Chun-Hao Chang, Keelung, TW;
Hsueh-Yi Chung, Hsinchu County, TW;
Shang-Yun Huang, Hsinchu County, TW;
Jui-Ping Chuang, Hsinchu, TW;
Li-Kong Turn, Taichung, TW;
Fei-Gwo Tsai, Taipei, TW;
Assignee:
Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 26/36 (2014.01); B23K 26/361 (2014.01); B23K 26/362 (2014.01); B23K 26/38 (2014.01); B23K 103/00 (2006.01);
U.S. Cl.
CPC ...
B23K 26/361 (2015.10); B23K 26/36 (2013.01); B23K 26/362 (2013.01); B23K 26/38 (2013.01); B23K 2203/50 (2015.10); B23K 2203/56 (2015.10);
Abstract
Systems and methods are provided for edge bead removal. A laser beam of approximately a wavelength is received. The laser beam is delivered along a predetermined beam path. The laser beam is projected on an edge portion of a wafer for edge bead removal.