The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 27, 2018

Filed:

Aug. 01, 2014
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;

Inventors:

Po-Chih Su, New Taipei, TW;

Hsueh-Liang Chou, Jhubei, TW;

Ruey-Hsin Liu, Hsin-Chu, TW;

Chun-Wai Ng, Hsin-Chu, TW;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 27/088 (2006.01); H01L 27/098 (2006.01); H01L 21/74 (2006.01); H01L 29/78 (2006.01); H01L 21/306 (2006.01); H01L 21/768 (2006.01); H01L 29/08 (2006.01); H01L 29/40 (2006.01); H01L 21/8234 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66666 (2013.01); H01L 21/30604 (2013.01); H01L 21/743 (2013.01); H01L 21/76877 (2013.01); H01L 21/823487 (2013.01); H01L 27/088 (2013.01); H01L 27/098 (2013.01); H01L 29/0847 (2013.01); H01L 29/402 (2013.01); H01L 29/7827 (2013.01); H01L 21/823456 (2013.01); H01L 21/823493 (2013.01); H01L 29/7833 (2013.01);
Abstract

A device includes a semiconductor region in a semiconductor chip, a gate dielectric layer over the semiconductor region, and a gate electrode over the gate dielectric. A drain region is disposed at a top surface of the semiconductor region and adjacent to the gate electrode. A gate spacer is on a sidewall of the gate electrode. A dielectric layer is disposed over the gate electrode and the gate spacer. A conductive field plate is over the dielectric layer, wherein the conductive field plate has a portion on a drain side of the gate electrode. A conductive via is disposed in the semiconductor region. A source electrode is underlying the semiconductor region, wherein the source electrode is electrically shorted to the conductive field plate through the conductive via.


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