The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 27, 2018

Filed:

Mar. 02, 2015
Applicant:

Lintec Corporation, Tokyo, JP;

Inventors:

Yosuke Koma, Tokyo, JP;

Takuo Nishida, Tokyo, JP;

Misaki Sakamoto, Tokyo, JP;

Assignee:

LINTEC CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/544 (2006.01); H01L 21/78 (2006.01); H01L 21/68 (2006.01); H01L 23/02 (2006.01); H01L 21/683 (2006.01); C09J 133/06 (2006.01); C09J 7/02 (2006.01); C09J 4/00 (2006.01); C09J 201/02 (2006.01); C09J 5/00 (2006.01); C09J 5/06 (2006.01); H01L 21/324 (2006.01); C08F 220/06 (2006.01); C09J 4/06 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6836 (2013.01); C09J 4/00 (2013.01); C09J 5/00 (2013.01); C09J 5/06 (2013.01); C09J 7/0217 (2013.01); C09J 7/0246 (2013.01); C09J 133/06 (2013.01); C09J 201/02 (2013.01); H01L 21/324 (2013.01); H01L 21/78 (2013.01); C08F 220/06 (2013.01); C09J 4/06 (2013.01); C09J 2201/122 (2013.01); C09J 2201/622 (2013.01); C09J 2203/326 (2013.01); C09J 2205/302 (2013.01); C09J 2205/31 (2013.01); H01L 2221/68322 (2013.01); H01L 2221/68327 (2013.01);
Abstract

As a semiconductor-related-member processing sheet which can stably achieve to enhance the removability of the semiconductor-related-member processing sheet and to suppress the reliability degradation of members comprising chips manufactured from a semiconductor-related member using the semiconductor-related-member processing sheet, there is provided a semiconductor-related-member processing sheet, comprising a base material and a pressure sensitive adhesive layer provided on or above one surface of the base material, wherein the pressure sensitive adhesive layer comprises one or more types of energy ray polymerizable compounds having an energy ray polymerizable functional group, wherein at least one type of the energy ray polymerizable compounds is a polymerizable branched polymer that is a polymer having a branched structure, wherein a contact angle on a measurement target surface is 40° or less when measured using a water droplet under an environment of 25° C. and a relative humidity of 50%.


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