The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 27, 2018
Filed:
Mar. 25, 2016
Tokyo Electron Limited, Tokyo, JP;
Kumiko Ono, Miyagi, JP;
Hiroshi Tsujimoto, Miyagi, JP;
Atsushi Sawachi, Miyagi, JP;
Norihiko Amikura, Miyagi, JP;
Norikazu Sasaki, Miyagi, JP;
Yoshitaka Kawaguchi, Miyagi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A gas supply control method uses a pressure control flowmeter and first and second valves provided upstream and downstream, respectively, of the pressure control flowmeter in a gas supply line. The pressure control flowmeter includes a control valve and an orifice. The gas supply control method includes maintaining a pressure Pof a first gas supply pipe between the orifice and the control valve and a pressure Pof a second gas supply pipe between the orifice and the second valve so as to satisfy P>2×P. The supply of gas is controlled by controlling the opening and closing of the second valve with the first valve being open and the control valve being controlled. A volume Vof the first gas supply pipe and a volume Vof the second gas supply pipe have a relationship of V/V≧9.