The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 20, 2018
Filed:
Dec. 31, 2015
Applicant:
Globalfoundries Singapore Pte. Ltd., Singapore, SG;
Inventors:
Assignee:
GLOBALFOUNDRIES SINGAPORE PTE. LTD., Singapore, SG;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2006.01); H01L 29/786 (2006.01); H01L 21/762 (2006.01); H01L 21/764 (2006.01);
U.S. Cl.
CPC ...
H01L 29/78603 (2013.01); H01L 21/764 (2013.01); H01L 21/76251 (2013.01);
Abstract
Integrated circuits and methods of producing such integrated circuits are provided. In one example, an integrated circuit has a working layer that includes a semiconductor substrate. A handle layer underlies the working layer, where a gap is defined in the handle layer such that an upper gap surface underlies the working layer. The gap has a gap area measured along a first plane at the gap upper surface. A switch directly overlies the gap, where the switch has a switch area measured along a second plane parallel with the first plane. The switch area is less than the gap area.