The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 30, 2018
Filed:
Jun. 16, 2016
Applied Materials, Inc., Santa Clara, CA (US);
Chien-Teh Kao, Sunnyvale, CA (US);
Benjamin Schmiege, Santa Clara, CA (US);
Xuesong Lu, San Jose, CA (US);
Juno Yu-Ting Huang, Sunnyvale, CA (US);
Yu Lei, Belmont, CA (US);
Yung-Hsin Lee, Sunnyvale, CA (US);
Srinivas Gandikota, Santa Clara, CA (US);
Rajkumar Jakkaraju, San Jose, CA (US);
Chikuang Charles Wang, San Jose, CA (US);
Ghazal Saheli, Campbell, CA (US);
Benjamin C. Wang, Santa Clara, CA (US);
Xinliang Lu, Fremont, CA (US);
Pingyan Lei, Santa Clara, CA (US);
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
Methods for depositing titanium oxide films by atomic layer deposition are disclosed. Titanium oxide films may include a titanium nitride cap, an oxygen rich titanium nitride cap or a mixed oxide nitride layer. Also described are methods for self-aligned double patterning including titanium oxide spacer films.