The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 02, 2018

Filed:

Dec. 11, 2014
Applicant:

Unimicron Technology Corp., Taoyuan, TW;

Inventors:

Dyi-Chung Hu, Hsinchu County, TW;

Ming-Chih Chen, Hsinchu, TW;

Tzyy-Jang Tseng, Hsinchu, TW;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/48 (2006.01); H05K 1/11 (2006.01); H05K 3/46 (2006.01); C25D 1/00 (2006.01); H05K 3/42 (2006.01);
U.S. Cl.
CPC ...
H01L 21/481 (2013.01); C25D 1/003 (2013.01); H05K 1/113 (2013.01); H05K 3/4647 (2013.01); H05K 3/424 (2013.01); H05K 3/4682 (2013.01); H05K 2201/10378 (2013.01); H05K 2203/0152 (2013.01); H05K 2203/0726 (2013.01); H05K 2203/0733 (2013.01); Y10T 29/49155 (2015.01); Y10T 156/10 (2015.01);
Abstract

A manufacturing method of an interposed substrate is provided. A photoresist layer is formed on a metal carrier. The photoresist layer has plural of openings exposing a portion of the metal carrier. Plural of metal passivation pads and plural of conductive pillars are formed in the openings. The metal passivation pads cover a portion of the metal carrier exposed by openings. The conductive pillars are respectively stacked on the metal passivation pads. The photoresist layer is removed to expose another portion of the metal carrier. An insulating material layer is formed on the metal cattier. The insulating material layer covers the another portion of the metal carrier and encapsulates the conductive pillars and the metal passivation pads. An upper surface of the insulating material layer and a top surface of each conductive pillar are coplanar. The metal carrier is removed to expose a lower surface of the insulating material layer.


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