The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 26, 2017

Filed:

Jul. 27, 2015
Applicant:

Asml Netherlands B.v., Veldhoven, NL;

Inventors:

Andrey Alexandrovich Nikipelov, Eindhoven, NL;

Teis Johan Coenen, Vught, NL;

Wouter Joep Engelen, Eindhoven, NL;

Gerrit Jacobus Hendrik Brussaard, Boxtel, NL;

Gijsbertus Geert Poorter, Veldhoven, NL;

Erik Roelof Loopstra, Eindhoven, NL;

Assignee:

ASML NETHERLANDS B.V., Veldhoven, NL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01S 3/00 (2006.01); H01S 3/09 (2006.01); H01S 3/0959 (2006.01); H01S 3/11 (2006.01); H01S 3/102 (2006.01);
U.S. Cl.
CPC ...
H01S 3/0903 (2013.01); H01S 3/0959 (2013.01); H01S 3/1103 (2013.01); H01S 3/1024 (2013.01); H01S 3/11 (2013.01);
Abstract

Passage through LINACs of electron bunches in their acceleration phase is coordinated with passage through the LINACs of electron bunches in their deceleration phase. Each successive pair of electron bunches are spaced in time by a respective bunch spacing, in accordance with a repeating electron bunch sequence. The electron source provides clearing gaps in the electron bunch sequence to allow clearing of ions at the undulator. The electron source provides the clearing gaps in accordance with a clearing gap sequence such that, for each of the plurality of energy recovery LINACS, and for substantially all of the clearing gaps: for each passage of the clearing gap through the LINAC in an acceleration phase or deceleration phase the clearing gap is coordinated with a further one of the clearing gaps passing through the LINAC in a deceleration phase or acceleration phase thereby to maintain energy recovery operation of the LINAC.


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