The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 28, 2017

Filed:

Jan. 14, 2016
Applicant:

Unimicron Technology Corp., Taoyuan, TW;

Inventors:

Dyi-Chung Hu, Hsinchu County, TW;

Ming-Chih Chen, Hsinchu, TW;

Tzyy-Jang Tseng, Hsinchu, TW;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/48 (2006.01); C25D 7/12 (2006.01); C25D 5/48 (2006.01); C25D 5/34 (2006.01); C25D 5/02 (2006.01); H05K 1/11 (2006.01); H05K 3/46 (2006.01); C25D 1/00 (2006.01); H05K 3/10 (2006.01); H05K 3/42 (2006.01);
U.S. Cl.
CPC ...
H01L 21/4857 (2013.01); C25D 1/003 (2013.01); C25D 5/022 (2013.01); C25D 5/34 (2013.01); C25D 5/48 (2013.01); C25D 7/12 (2013.01); H05K 1/113 (2013.01); H05K 3/10 (2013.01); H05K 3/4647 (2013.01); H05K 3/424 (2013.01); H05K 3/4682 (2013.01); H05K 2201/10378 (2013.01); H05K 2203/0152 (2013.01); H05K 2203/0733 (2013.01); Y10T 29/49155 (2015.01);
Abstract

A manufacturing method of an interposed substrate is provided. A metal-stacked layer comprising a first metal layer, an etching stop layer and a second metal layer is formed. A patterned conductor layer is formed on the first metal layer, wherein the patterned conductor layer exposes a portion of the first metal layer. A plurality of conductive pillars is formed on the patterned conductor layer, wherein the conductive pillars are separated from each other and stacked on a portion of the patterned conductor layer. An insulating material layer is formed on the metal-stacked layer, wherein the insulating material layer covers the portion of the first metal layer and encapsulates the conductive pillars and the other portion of the patterned conductor layer. The metal-stacked layer is removed to expose a lower surface opposite to an upper surface of the insulating material layer and a bottom surface of the patterned conductor layer.


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