The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 21, 2017
Filed:
Jul. 18, 2014
American Air Liquide, Inc., Fremont, CA (US);
L'air Liquide, Société Anonyme Pour L'etude ET L'exploitation Des Procédés Georges Claude, Paris, FR;
Glenn Kuchenbeiser, Nnewark, DE (US);
Christian Dussarrat, Tokyo, JP;
Venkateswara R. Pallem, Hockessin, DE (US);
American Air Liquide, Inc., Fremont, CA (US);
L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude, Paris, FR;
Abstract
Disclosed are hexacoordinate silicon-containing precursors, methods of synthesizing the same, and methods of using the same to deposit silicon-containing films using vapor deposition processes for manufacturing semiconductors, photovoltaics, LCD-TFT, flat panel type devices, refractory materials, or aeronautics. The hexacoordinate silicon-containing molecule have the following formula: (I), wherein each L, L, Land Lis independently selected from oxygen or nitrogen atoms; Land Lare joined together via a carbon bridge having one to three carbon atoms; Land Lare joined together via a carbon bridge having one to three carbon atoms; L, Land the carbon bridge forming a monoanionic ligand bonded to silicon; and L, Land the carbon bridge form a monoanionic ligand bonded to silicon.