The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 07, 2017
Filed:
Jan. 09, 2015
Hitachi High-technologies Corporation, Minato-ku, Tokyo, JP;
Minami Shouji, Tokyo, JE;
Takashi Ohshima, Tokyo, JP;
Yuusuke Oominami, Tokyo, JP;
Hideo Morishita, Tokyo, JP;
Kunio Harada, Tokyo, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
The objective of the present invention is to simply perform image observation through transmitted charged particles. A sample irradiated by a charged particle beam is disposed directly or via a predetermined member on a light-emitting element () whereinto charged particles that have traversed or scattered inside the sample enter, causing a light to be emitted therefrom, which is collected and detected efficiently using a light transmission means () to generate a transmission charged particle image of the sample.