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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9809672 B1

PDFFull Text
Date of Patent:
Nov. 07, 2017

Filed:

Nov. 29, 2016

Aromatic resins for underlayers

Applicants:

Rohm and Haas Electronic Materials Llc, Marlborough, MA (US);

Rohm and Haas Electronic Materials Korea Ltd., Chungcheongnam-do, KR;

Inventors:

Li Cui, Westborough, MA (US);

Sung Wook Cho, Gyeonggi-do, KR;

Mingqi Li, Shrewsbury, MA (US);

Shintaro Yamada, Shrewsbury, MA (US);

Peter Trefonas, III, Medway, MA (US);

Robert L. Auger, Midland, MI (US);

Assignees:

Rohm and Haas Electronic Materials LLC, Marlborough, MA (US);

Rohm and Haas Electronic Materials Korea Ltd, Cheonan, KR;

Attorney:

S. Matthew Cairns

Primary Examiner:

John S Chu

Int. Cl.
CPC ...
G03F 7/09 (2006.01); C08G 8/08 (2006.01); C09D 161/06 (2006.01); C08G 8/04 (2006.01); H01L 21/311 (2006.01); G03F 7/16 (2006.01); G03F 7/20 (2006.01); G03F 7/26 (2006.01);
U.S. Cl.
CPC ...
C08G 8/04 (2013.01); C08G 8/08 (2013.01); C09D 161/06 (2013.01); G03F 7/091 (2013.01); G03F 7/094 (2013.01); G03F 7/16 (2013.01); G03F 7/168 (2013.01); G03F 7/2002 (2013.01); G03F 7/26 (2013.01); H01L 21/31111 (2013.01); H01L 21/31144 (2013.01);
Abstract

Polymeric reaction products of certain aromatic alcohols with certain aromatic aldehydes are useful as underlayers in semiconductor manufacturing processes.

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Quick Actions:

Cui, Li. (2017). Aromatic resins for underlayers (U.S. Patent No. 9809672). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9809672

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