The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 31, 2017
Filed:
Jun. 25, 2015
Cabot Microelectronics Corporation, Aurora, IL (US);
Steven Grumbine, Aurora, IL (US);
Jeffrey Dysard, St. Charles, IL (US);
Ernest Shen, Naperville, IL (US);
Mary Cavanaugh, Naperville, IL (US);
Daniel Clingerman, Chicago, IL (US);
Cabot Microelectronics Corporation, Aurora, IL (US);
Abstract
Methods for fabricating a chemical-mechanical polishing composition include growing colloidal silica abrasive particles in a liquid including an aminosilane compound such that the aminosilane compound becomes incorporated in the abrasive particles. A dispersion including such colloidal silica abrasive particles may be further processed to obtain a chemical-mechanical polishing composition including colloidal silica particles having the aminosilane compound incorporated therein.