The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 17, 2017

Filed:

Jun. 14, 2016
Applicant:

Silicon Storage Technology, Inc., San Jose, CA (US);

Inventors:

Jeng-Wei Yang, Zhubei, TW;

Man-Tang Wu, Hsinchu County, TW;

Chun-Ming Chen, New Taipei, TW;

Mandana Tadayoni, Cupertino, CA (US);

Chien-Sheng Su, Saratoga, CA (US);

Nhan Do, Saratoga, CA (US);

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 27/115 (2017.01); H01L 27/11524 (2017.01); H01L 29/423 (2006.01); H01L 21/28 (2006.01); H01L 29/788 (2006.01); H01L 29/66 (2006.01); G11C 16/26 (2006.01); H01L 27/11521 (2017.01);
U.S. Cl.
CPC ...
H01L 27/11524 (2013.01); G11C 16/26 (2013.01); H01L 21/28273 (2013.01); H01L 29/42328 (2013.01); H01L 29/66825 (2013.01); H01L 29/7881 (2013.01); H01L 29/7883 (2013.01); H01L 27/11521 (2013.01);
Abstract

A memory device including a silicon semiconductor substrate, spaced apart source and drain regions formed in the substrate with a channel region there between, and a conductive floating gate disposed over a first portion of the channel region and a first portion of the source region. An erase gate includes a first portion that is laterally adjacent to the floating gate and over the source region, and a second portion that extends up and over the floating gate. A conductive word line gate is disposed over a second portion of the channel region. The word line gate is disposed laterally adjacent to the floating gate and includes no portion disposed over the floating gate. The thickness of insulation separating the word line gate from the second portion of the channel region is less than that of insulation separating the floating gate from the erase gate.


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