The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 10, 2017
Filed:
Sep. 17, 2013
Asml Netherlands B.v., Veldhoven, NL;
Jan Bernard Plechelmus Van Schoot, Veldhoven, NL;
Sven Antoin Johan Hol, Eindhoven, NL;
Edwin Johan Buis, Belfeld, NL;
Erik Maria Rekkers, Boxtel, NL;
Gosse Charles De Vries, Veldhoven, NL;
Hako Botma, Veldhoven, NL;
Marinus Johannes Maria Van Dam, Veldhoven, NL;
Ramon Pascal Van Gorkom, Veldhoven, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
An actuator to displace, for example a mirror, provides movement with at least two degrees of freedom by varying the currents in two electromagnets. A moving part includes a permanent magnet with a magnetic face constrained to move over a working area lying substantially in a first plane perpendicular to a direction of magnetization of the magnet. The electromagnets have pole faces lying substantially in a second plane closely parallel to the first plane, each pole face substantially filling a quadrant of the area traversed by the face of the moving magnet. An optical position sensor may direct a beam of radiation at the moving magnet through a central space between the electromagnets. The sizes of facets in a pupil mirror device may be made smaller in a peripheral region, but larger in a central region, thereby relaxing focusing requirements.