The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2017
Filed:
Feb. 29, 2016
Nuflare Technology, Inc., Yokohama-shi, JP;
Shigehiro Hara, Kawasaki, KR;
Kenichi Yasui, Kawasaki, JP;
Hiroshi Yamashita, Sagamihara, JP;
Yasuo Kato, Yokohama, JP;
Saori Gomi, Zushi, JP;
Shinji Sakamoto, Yokohama, JP;
Takao Tamura, Machida, JP;
Hideo Tsuchiya, Setagaya-ku, JP;
Noriaki Nakayamada, Kamakura, JP;
Hironobu Matsumoto, Yokohama, JP;
NuFlare Technology, Inc., Yokohama-shi, JP;
Abstract
In one embodiment, a charged particle beam drawing apparatus includes a drawing unit that draws a pattern in a drawing area on a substrate and a control processing circuitry that controls the drawing unit via a process including receiving drawing data with a hierarchical correction map input to the control processing circuitry. The drawing data with the hierarchical map includes a plurality of files in which division maps are respectively described in files in units of subframes. Each division map includes dose correction information associated with corresponding one of blocks of the drawing area. The process further includes generating shot data by performing a data conversion process on the drawing data, reading a division map corresponding to a block in the area to be drawn from the hierarchical correction map, calculating a dose, and controlling the drawing unit based on the shot data and the calculated dose.