The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 26, 2017
Filed:
Oct. 28, 2015
Applicant:
Cabot Microelectronics Corporation, Aurora, IL (US);
Inventors:
Kevin Dockery, Aurora, IL (US);
Helin Huang, Aurora, IL (US);
Lin Fu, Naperville, IL (US);
Tina Li, Warrenville, IL (US);
Assignee:
Cabot Microelectronics Corporation, Aurora, IL (US);
Primary Examiner:
Int. Cl.
CPC ...
C09G 1/02 (2006.01); B24B 37/24 (2012.01); C23F 3/04 (2006.01);
U.S. Cl.
CPC ...
C09G 1/02 (2013.01); B24B 37/24 (2013.01); C23F 3/04 (2013.01);
Abstract
Described are chemical-mechanical polishing compositions (e.g., slurries) and methods of using the slurries for chemical-mechanical polishing (or planarizing) a surface of a substrate that contains tungsten, the compositions containing cationic surfactant and cyclodextrin.