The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 19, 2017

Filed:

May. 24, 2016
Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;

Inventors:

Wan-Jyun Syue, Hsinchu County, TW;

Chin-Yi Huang, Hsinchu, TW;

Kuo-Lung Tzeng, Yilan County, TW;

Zhuo-Cang Yang, Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 29/78 (2006.01); H01L 29/10 (2006.01); H01L 29/06 (2006.01); H01L 21/265 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7825 (2013.01); H01L 21/26513 (2013.01); H01L 29/0653 (2013.01); H01L 29/1083 (2013.01); H01L 29/1095 (2013.01); H01L 29/66704 (2013.01);
Abstract

A laterally diffused metal-oxide-semiconductor (LDMOS) transistor with a vertical channel region is provided. A first semiconductor region is formed over a second semiconductor region and with a first doping type. The second semiconductor region has a second doping type different than the first doping type. A gate electrode is formed laterally adjacent to the first semiconductor region and extending along a side boundary of the first semiconductor region. A first source/drain contact region and a second source/drain contact region are respectively formed on opposite sides of the gate electrode and with the second doping type. The first source/drain contact region is further formed over the first semiconductor region. A method for manufacturing the LDMOS transistor is also provided.


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