The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 19, 2017
Filed:
Dec. 04, 2013
Applicants:
Entegris, Inc., Billerica, MA (US);
Atmi Taiwan Co., Ltd, Hsinchu, TW;
Inventors:
Emanuel I. Cooper, Scarsdale, NY (US);
Hsing-Chen Wu, Yonghe, TW;
Min-Chieh Yang, Yonghe, TW;
Sheng-Hung Tu, Yonghe, TW;
Li-Min Chen, Norwalk, CT (US);
Assignee:
ENTEGRIS, INC., Billerica, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C11D 7/04 (2006.01); C11D 7/26 (2006.01); C11D 7/32 (2006.01); C11D 3/00 (2006.01); C11D 7/08 (2006.01); C11D 11/00 (2006.01);
U.S. Cl.
CPC ...
C11D 7/04 (2013.01); C11D 3/0073 (2013.01); C11D 7/08 (2013.01); C11D 7/26 (2013.01); C11D 7/265 (2013.01); C11D 7/3209 (2013.01); C11D 7/3281 (2013.01); C11D 11/0047 (2013.01);
Abstract
Liquid compositions useful for the cleaning of residue and contaminants from a III-V microelectronic device material, such as InGaAs, without substantially removing the III-V material. The liquid compositions are improvements of the SC1 and SC2 formulations.