The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 12, 2017
Filed:
Aug. 05, 2014
Asml Netherlands B.v., Veldhoven, NL;
Seyed Iman Mossavat, Veldhoven, NL;
Hugo Augustinus Joseph Cramer, Veldhoven, NL;
Willem Jan Grootjans, Veldhoven, NL;
Adriaan Johan Van Leest, Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
Methods and inspection apparatus and computer program products for assessing a quality of reconstruction of a value of a parameter of interest of a structure, which may be applied for example in metrology of microscopic structures. It is important the reconstruction provides a value of a parameter of interest (e.g. a CD) of the structure which is accurate as the reconstructed value is used to monitor and/or control a lithographic process. This is a way of assessing a quality of reconstruction () of a value of a parameter of interest of a structure which does not require the use of a scanning electron microscope, by predicting () values of the parameter of interest of structures using reconstructed values of parameters of structures, and by comparing () the predicted values of the parameter of interest and the reconstructed values of the parameter of interest.