The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 22, 2017

Filed:

Jul. 31, 2015
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;

Inventors:

Hung-Ta Lin, Hsin-Chu, TW;

Chun-Feng Nieh, Hsin-Chu, TW;

Chung-Yi Yu, Hsin-Chu, TW;

Chi-Ming Chen, Zhubei, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 29/06 (2006.01); H01L 29/205 (2006.01); H01L 21/02 (2006.01); H01L 21/306 (2006.01); H01L 21/762 (2006.01); H01L 29/267 (2006.01); H01L 29/78 (2006.01); H01L 29/778 (2006.01); H01L 29/15 (2006.01);
U.S. Cl.
CPC ...
H01L 29/267 (2013.01); H01L 21/02546 (2013.01); H01L 21/30612 (2013.01); H01L 21/76224 (2013.01); H01L 29/0653 (2013.01); H01L 29/205 (2013.01); H01L 29/66462 (2013.01); H01L 29/66522 (2013.01); H01L 29/66795 (2013.01); H01L 29/7783 (2013.01); H01L 29/785 (2013.01); H01L 29/155 (2013.01);
Abstract

A device includes insulation regions over portions of a semiconductor substrate, and a III-V compound semiconductor region over top surfaces of the insulation regions, wherein the III-V compound semiconductor region overlaps a region between opposite sidewalls of the insulation regions. The III-V compound semiconductor region includes a first and a second III-V compound semiconductor layer formed of a first III-V compound semiconductor material having a first band gap, and a third III-V compound semiconductor layer formed of a second III-V compound semiconductor material between the first and the second III-V compound semiconductor layers. The second III-V compound semiconductor material has a second band gap lower than the first band gap. A gate dielectric is formed on a sidewall and a top surface of the III-V compound semiconductor region. A gate electrode is formed over the gate dielectric.


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