The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 08, 2017
Filed:
Apr. 15, 2015
Applicant:
International Business Machines Corporation, Armonk, NY (US);
Inventors:
Hanyi Ding, Colchester, VT (US);
Mark D. Jaffe, Selburne, VT (US);
Alvin J. Joseph, Williston, VT (US);
Anthony K. Stamper, Williston, VT (US);
Assignee:
GLOBALFOUNDRIES INC., Grand Cayman, KY;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/76 (2006.01); H01L 23/52 (2006.01); H01Q 1/22 (2006.01); H01L 21/762 (2006.01); H01Q 9/16 (2006.01);
U.S. Cl.
CPC ...
H01Q 1/2283 (2013.01); H01L 21/76224 (2013.01); H01Q 9/16 (2013.01);
Abstract
Approaches for an on-chip antenna are provided. A method includes forming an antenna in an insulator layer at a front side of a substrate. The method also includes forming a trench in the substrate underneath the antenna. The method further includes forming a fill material in the trench. The substrate is composed of a material having a first dielectric constant. The fill material has a second dielectric constant that is less than the first dielectric constant.