The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 25, 2017
Filed:
Jul. 07, 2016
Tokyo Electron Limited, Tokyo, JP;
Yasushi Takiguchi, Koshi, JP;
Taro Yamamoto, Koshi, JP;
Akihiro Fujimoto, Koshi, JP;
Shuuichi Nishikido, Koshi, JP;
Dai Kumagai, Koshi, JP;
Naoto Yoshitaka, Koshi, JP;
Takahiro Kitano, Koshi, JP;
Yoichi Tokunaga, Koshi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A disclosed substrate cleaning apparatus for cleaning a back surface of a substrate includes a first substrate supporting portion configured to support the substrate at a first area of a back surface of the substrate, the back surface facing down; a second substrate supporting portion configured to support the substrate at a second area of the back surface of the substrate, the second area being separated from the first area; a cleaning liquid supplying portion configured to supply cleaning liquid to the back surface of the substrate; a drying portion configured to dry the second area of the back surface of the substrate; and a cleaning portion configured to clean a third area of the back surface of the substrate when the substrate is supported by the first substrate supporting portion, the third area including the second area, and a fourth area of the back surface of the substrate when the substrate is supported by the second substrate supporting portion, the fourth area excluding the second area of the back surface.