The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 2017
Filed:
Feb. 18, 2014
Tokyo Electron Limited, Tokyo, JP;
Intel Corporation, Santa Clara, CA (US);
Yasuharu Iwashita, Kumamoto, JP;
Osamu Hirakawa, Kumamoto, JP;
Yasutaka Soma, Kumamoto, JP;
Takeshi Tamura, Kumamoto, JP;
Kazutaka Noda, Kumamoto, JP;
Xavier Francois Brun, Chandler, AZ (US);
Charles Wayne Singleton, Jr., Chandler, AZ (US);
Tokyo Electron Limited, Tokyo, JP;
Intel Corporation, Santa Clara, CA (US);
Abstract
Disclosed is a substrate conveyance apparatus capable of suppressing a substrate from being damaged. The substrate conveyance apparatus includes a plurality of nozzles, and a main body unit. The plurality of nozzles are configured to jet a gas toward a surface of a substrate to hold the substrate in a non-contact manner. The main body unit is provided with the plurality of nozzles. At least surfaces of the plurality of nozzles are formed of a resin.