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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9679738 B1

PDFFull Text
Date of Patent:
Jun. 13, 2017

Filed:

May. 16, 2014

Electron microscope

Applicant:

Hitachi High-technologies Corporation, Minato-ku, Tokyo, JP;

Inventors:

Hiroaki Matsumoto, Tokyo, JP;

Takeshi Sato, Tokyo, JP;

Yoshifumi Taniguchi, Tokyo, JP;

Ken Harada, Tokyo, JP;

Assignee:

Hitachi High-Technologies Corporation, Tokyo, JP;

Attorney:

Crowell & Moring LLP

Primary Examiner:

Andrew Smyth

Int. Cl.
CPC ...
H01J 47/00 (2006.01); H01J 37/10 (2006.01); H01J 37/295 (2006.01); H01J 37/04 (2006.01); H01J 37/26 (2006.01); G01N 23/20 (2006.01); H01J 37/09 (2006.01); H01J 37/147 (2006.01); H01J 37/153 (2006.01); H01J 37/24 (2006.01); H01J 37/244 (2006.01); H01J 37/28 (2006.01); H01J 37/05 (2006.01); H01J 37/285 (2006.01);
U.S. Cl.
CPC ...
H01J 37/10 (2013.01); G01N 23/20058 (2013.01); H01J 37/04 (2013.01); H01J 37/05 (2013.01); H01J 37/09 (2013.01); H01J 37/147 (2013.01); H01J 37/1472 (2013.01); H01J 37/153 (2013.01); H01J 37/24 (2013.01); H01J 37/244 (2013.01); H01J 37/26 (2013.01); H01J 37/261 (2013.01); H01J 37/28 (2013.01); H01J 37/285 (2013.01); H01J 37/295 (2013.01); G01N 2223/418 (2013.01); H01J 2237/21 (2013.01); H01J 2237/2614 (2013.01);
Abstract

The present invention relates to a lens-less Foucault method wherein a transmission electron microscope objective lens () is turned off, an electron beam crossover () is matched with a selected area aperture (), and the focal distance of a first imaging lens () can be changed to enable switching between a sample image observation mode and a sample diffraction pattern observation mode, characterized in that a deflector () is disposed in a stage following the first imaging lens (), and conditions for an irradiating optical system () can be fixed after conditions for the imaging optical system have been determined. This allows a lens-less Foucault method to be implemented in a common general-use transmission electron microscope with no magnetic shielding lens equipped, without burdening the operator.

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