The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 2017
Filed:
Nov. 13, 2015
Air Products and Chemicals, Inc., Allentown, PA (US);
Daniel P. Spence, Carlsbad, CA (US);
Xinjian Lei, Vista, CA (US);
Ronald Martin Pearlstein, San Marcos, CA (US);
Manchao Xiao, San Diego, CA (US);
Richard Ho, Anaheim, CA (US);
VERSUM MATERIALS US, LLC, Allentown, PA (US);
Abstract
Alkoxyaminosilane compound having formula I, and processes and compositions for depositing a silicon-containing film, are described herein:(RR)NSiROROR  Formula (I)wherein Ris independently selected from a linear or branched Cto Calkyl group; a Cto Calkenyl group; a Cto Calkynyl group; a Cto Ccyclic alkyl group; and a Cto Caryl group; Rand Rare each independently selected from hydrogen; a linear or branched Cto Calkyl group; a Cto Calkenyl group, a Cto Calkynyl group, a Cto Ccyclic alkyl group, and a Cto Caryl group; and Rand Rare each independently selected from a linear or branched Cto Calkyl group; a Cto Calkenyl group; a Cto Calkynyl group; a Cto Ccyclic alkyl group; and a Cto Caryl group.