The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 06, 2017
Filed:
Jun. 19, 2014
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
The invention relates to an optical arrangement comprising: at least one optical element comprising an optical surface and a substrate, wherein the substrate is formed from a material whose temperature-dependent coefficient of thermal expansion at a zero crossing temperature ΔT=T−Trelated to a reference temperature Tis equal to zero, wherein the optical surface has, during the operation of the optical arrangement, a location-dependent temperature distribution ΔT(x, y) that is dependent on a local irradiance (), is related to the reference temperature Tand has an average temperature ΔT, a minimum temperature ΔTand a maximum temperature ΔT, wherein the average temperature ΔTis less than the average value 1/2 (ΔT+ΔT) formed from the minimum temperature ΔTand the maximum temperature ΔT, and wherein the zero crossing temperature ΔTis greater than the average temperature ΔT.