The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 16, 2017

Filed:

Mar. 25, 2014
Applicant:

Atotech Deutschland Gmbh, Berlin, DE;

Inventors:

Frank Brüning, Berlin, DE;

Elisa Langhammer, Berlin, DE;

Michael Merschky, Berlin, DE;

Christian Lowinski, Berlin, DE;

Jörg Schulze, Oranienburg, DE;

Johannes Etzkorn, Berlin, DE;

Birgit Beck, Berlin, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 18/40 (2006.01); H01L 21/768 (2006.01); H01L 23/532 (2006.01); C23C 18/16 (2006.01);
U.S. Cl.
CPC ...
C23C 18/40 (2013.01); C23C 18/1639 (2013.01); C23C 18/405 (2013.01); H01L 21/76879 (2013.01); H01L 23/53228 (2013.01); H01L 2924/0002 (2013.01);
Abstract

The invention relates to an electroless aqueous copper plating solution, comprising: a source of copper ions, a reducing agent or a source of a reducing agent, and a combination of complexing agents comprising i) polyamino disuccinic acid, polyamino monosuccinic acid, or a combination thereof, and ii) one or more of ethylenediamine tetraacetic acid, N'-(2-Hydroxyethyl)-ethylenediamine-N,N,N′-triacetic acid, and N,N,N′,N′-Tetrakis (2-hydroxypropyl)ethylenediamine, as well as methods for electroless copper plating utilizing the solution and uses of the solution for the plating of various substrates.


Find Patent Forward Citations

Loading…