The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 11, 2017
Filed:
Jun. 18, 2015
Fei Company, Hillsboro, OR (US);
Pavel Poto{hacek over (c)}ek, Eindhoven, NL;
Cornelis Sander Kooijman, Veldhoven, NL;
Hendrik Nicolaas Slingerland, Venlo, NL;
Gerard Nicolaas Anne van Veen, Waalre, NL;
Faysal Boughorbel, Eindhoven, NL;
FEI Company, Hillsboro, OR (US);
Abstract
A method and apparatus for imaging a specimen using a scanning-type microscope, by irradiating a specimen with a beam of radiation using a scanning motion, and detecting a flux of radiation emanating from the specimen in response to the irradiation, in the first sampling session {S} of a set {S}, gathering data from a first collection of sparsely distributed sampling points {P} of set {P}. A mathematical registration correction is made to compensate for drift mismatches between different members of the set {P}, and an image of the specimen is assembled using the set {P} as input to an integrative mathematical reconstruction procedure.