The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 04, 2017

Filed:

Nov. 11, 2014
Applicant:

Globalfoundries Singapore Pte. Ltd., Singapore, SG;

Inventors:

Mahesh Bhatkar, Singpaore, SG;

Lulu Peng, Singapore, SG;

Wanbing Yi, Singapore, SG;

Juan Boon Tan, Singapore, SG;

Luke England, Saratoga Springs, NY (US);

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01F 5/00 (2006.01); H01F 27/28 (2006.01); H01L 23/522 (2006.01); H01F 27/24 (2006.01); H01F 1/147 (2006.01); H01F 1/14 (2006.01); H01L 49/02 (2006.01);
U.S. Cl.
CPC ...
H01L 23/5227 (2013.01); H01F 1/14 (2013.01); H01F 1/14708 (2013.01); H01F 1/14766 (2013.01); H01F 27/24 (2013.01); H01F 27/2804 (2013.01); H01L 28/10 (2013.01); H01F 2027/2809 (2013.01); H01L 2924/0002 (2013.01);
Abstract

Magnetic core inductors implemented on integrated circuits and methods for fabricating such magnetic core inductors are disclosed. An exemplary magnetic core inductor includes a bottom magnetic plate that includes a center portion and first, second, third, and fourth extension portions extending from the center portion. The exemplary magnetic core inductor includes an interlayer dielectric layer disposed over the bottom magnetic plate, and within the interlayer dielectric layer, first, second, third, and fourth via trenches extending above a respective one of the first, second, third, and fourth extension portions, and a fifth via trench extending above the center portion. The magnetic core inductor further includes a stacked-ring inductor coil including a plurality of inductor rings surrounding the fifth via trench and a top magnetic plate including a center portion and first, second, third, and fourth extension portions extending from the center portion.


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