The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 04, 2017
Filed:
May. 20, 2014
Uchicago Argonne, Llc, Chicago, IL (US);
Deming Shu, Darien, IL (US);
Jie Liu, Lisle, IL (US);
Sophie C. Gleber, Oak Park, IL (US);
Joan Vila-Comamala, Oak Park, IL (US);
Barry Lai, Woodridge, IL (US);
Jorg M. Maser, Oak Park, IL (US);
Christian Roehrig, Plainfield, IL (US);
Michael J. Wojcik, Tinley Park, IL (US);
Franz Stefan Vogt, Plainfield, IL (US);
UChicago Argonne LLC, Chicago, IL (US);
Abstract
An enhanced mechanical design of multiple zone plates precision alignment apparatus for hard x-ray focusing in a twenty-nanometer scale is provided. The precision alignment apparatus includes a zone plate alignment base frame; a plurality of zone plates; and a plurality of zone plate holders, each said zone plate holder for mounting and aligning a respective zone plate for hard x-ray focusing. At least one respective positioning stage drives and positions each respective zone plate holder. Each respective positioning stage is mounted on the zone plate alignment base frame. A respective linkage component connects each respective positioning stage and the respective zone plate holder. The zone plate alignment base frame, each zone plate holder and each linkage component is formed of a selected material for providing thermal expansion stability and positioning stability for the precision alignment apparatus.